Miniaturized Inductive LC Pressure Sensor

Real-time pressure monitoring of organs is helpful in habitually tracking a patient's health and assessing the optimal time for medical intervention. Conventional pressure sensors rely on capacitive coupling but trade sensitivity, accuracy, and shelf life for scalability. This project investigates the concept of a novel inductive pressure sensor with aluminum/copper integrated silicon coils, silicon-dioxide insulation, and a silicon base. ANSYS Electronic was used to design and simulate the functionality of the pressure sensor by using displacement of the primary coil to relate pressure applied to the device. The design simulations showed a lower result compared to the expected values, largely due to the simulation applying other variables resulting in more accurate values. The high resistance is a factor that affected the performance of the designs and finding a way to reduce the resistance would be the next step in optimizing the inductive LC coil.