FPCB Micromirrors for 3D Scanning LIDAR

This thesis presents two types of FPCB (Flexible Printed Circuit Board) micromirrors, i.e., 1D (rotation about one axis) FPCB micromirror and 2D (rotation about two perpendicular axes) FPCB micromirror. Each type of micromirror is integrated with a commercial single-point LIDAR (TF03) to form a scanning 3D LIDAR, which can be used in autonomous guided vehicles (AGVs). Using the 3D scanning LIDAR, real-time 3D point cloud maps can be generated by collecting positional data and processing it on a computer. The first 3D LIDAR scanning system uses two 1D FPCB mirrors rotating about perpendicular axes to steer an infrared (IR) laser from the LIDAR (Class 1 laser) and collect the diffusion reflected light at the receiver. This system is capable of: 1) field of view (FOV) of 38°×24°; 2) 12.5 or 25 horizontal scanning lines, 3) refreshing rate of 2 or 4 frames per second (fps), 4) 0.2~20 meters detection distance, and 5) 1,250-5,000 points per frame. The second 3D LIDAR system uses a single 2D FPCB mirror to steer the LIDAR light in two axial directions where one axis is actuated with Lorentz forces and the other by electromagnetic solenoids. This second system can achieve: 1) FOV of 40°×24; 2) 15 or 30 horizontal scanning lines; 3) refreshing rate of 2.5 or 5 fps; 4) detecting distance of 0.2~20 meters; and 5) 1,000-4,000 points per frame.